Title :
Dynamics of HiPIMS Discharge Operated in Oxygen
Author :
Hála, M. ; Zabeida, O. ; Klemberg-Sapieha, J.E. ; Martinu, L.
Author_Institution :
Dept. of Eng. Phys., Ecole Polytech. de Montreal, Montreal, QC, Canada
Abstract :
We report on time- and species-resolved plasma imaging analysis of high-power impulse magnetron sputtering discharge operated above a Cr target in pure oxygen. It was found that the discharge emission is dominated by oxygen species. No metal-dominated sputtering has been detected, in contrast to the discharges in Ar, N2, and N2/Ar mixtures investigated previously.
Keywords :
argon; chromium; discharges (electric); gas mixtures; nitrogen; oxygen; plasma diagnostics; Ar; HiPIMS discharge dynamics; N2; N2-Ar; O2; discharge emission process; high-power impulse magnetron sputtering discharge; species-resolved plasma imaging analysis; time-resolved plasma imaging analysis; Argon; Discharges; Magnetic resonance imaging; Optical imaging; Optical pulses; Plasmas; Stimulated emission; High-power impulse magnetron sputtering (HiPIMS); magnetron sputtering; optical emission spectroscopy; optical filters; pulsed plasmas;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2011.2150248
