Title :
Thickness effect on 1 GHz permeability of (CoFeB)-(SiO2) films with high electrical resistivity
Author :
Munakata, Makoto ; Yagi, Masaaki ; Motoyama, Mashio ; Shimada, Yutaka ; Baba, Makoto ; Yamaguchi, Masahiro ; Arai, Ken-Ichi
Author_Institution :
Energy Electron. Lab., Sojo Univ., Kumamoto, Japan
fDate :
7/1/2001 12:00:00 AM
Abstract :
Highly resistive (CoFeB)-(SiO2) films for magnetic core of 1 GHz driving inductor were deposited on glass substrates by synchronous dual-rf magnetron sputtering. Permeability characteristics In the range of a few GHz were investigated. The thickness effect on the reciprocal of the loss factors of tan δ (μr\´/μ r") were investigated at 1 GHz. The film exhibited the maximum value of μr\´/μr" of 5.7 for film thickness d=0.1 μm, with relative permeability of 120-150 and resonance frequency fr=1.6-1.9 GHz. The result shows good potential for magnetic core of 1 GHz driving inductor
Keywords :
boron alloys; cobalt alloys; electrical resistivity; ferromagnetic materials; inductors; iron alloys; magnetic cores; magnetic permeability; magnetic thin films; silicon compounds; soft magnetic materials; sputtered coatings; (CoFeB)-(SiO2); (CoFeB)-(SiO2) film; 1 GHz; RF integrated inductor; electrical resistivity; glass substrate; loss factor; magnetic core; magnetic permeability; resonance frequency; soft ferromagnetic material; synchronous dual-RF magnetron sputtering; thickness effect; Electric resistance; Magnetic cores; Magnetic films; Magnetic materials; Magnetic resonance; Permeability; Radio frequency; Soft magnetic materials; Sputtering; Yagi-Uda antennas;
Journal_Title :
Magnetics, IEEE Transactions on
