DocumentCode
1533146
Title
Fabrication of thick film magnetic cores for high frequency using LIGA process
Author
Takimoto, Shinsuke ; Ueno, Hiroshi ; Sugiyama, Susumu ; Yamaguchi, Masahiro ; Baba, Makoto ; Arai, Ken-Ichi
Author_Institution
Fac. of Sci. & Eng., Ritsumeikan Univ., Kyoto, Japan
Volume
37
Issue
4
fYear
2001
fDate
7/1/2001 12:00:00 AM
Firstpage
2888
Lastpage
2890
Abstract
Fabrication of magnetic cores with narrow slits which have low eddy current loss for high frequency has been investigated. The magnetic cores with narrow slits of 1.5 μm to 5 μm in width were fabricated by the LIGA process which is composed of deep X-ray lithography using synchrotron radiation (SR) and Ni electroforming. Magnetic hysteresis loops and permeability of the magnetic cores with various slit widths and distances between slits were measured
Keywords
LIGA; eddy current losses; magnetic cores; magnetic hysteresis; magnetic permeability; thick films; LIGA process; Ni; deep X-ray lithography; eddy current loss; electroforming; fabrication; high-frequency characteristics; magnetic hysteresis; magnetic permeability; slit width; synchrotron radiation; thick film magnetic core; Eddy currents; Fabrication; Frequency; Magnetic cores; Magnetic hysteresis; Permeability; Strontium; Synchrotron radiation; Thick films; X-ray lithography;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.951337
Filename
951337
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