Title :
Fabrication of thick film magnetic cores for high frequency using LIGA process
Author :
Takimoto, Shinsuke ; Ueno, Hiroshi ; Sugiyama, Susumu ; Yamaguchi, Masahiro ; Baba, Makoto ; Arai, Ken-Ichi
Author_Institution :
Fac. of Sci. & Eng., Ritsumeikan Univ., Kyoto, Japan
fDate :
7/1/2001 12:00:00 AM
Abstract :
Fabrication of magnetic cores with narrow slits which have low eddy current loss for high frequency has been investigated. The magnetic cores with narrow slits of 1.5 μm to 5 μm in width were fabricated by the LIGA process which is composed of deep X-ray lithography using synchrotron radiation (SR) and Ni electroforming. Magnetic hysteresis loops and permeability of the magnetic cores with various slit widths and distances between slits were measured
Keywords :
LIGA; eddy current losses; magnetic cores; magnetic hysteresis; magnetic permeability; thick films; LIGA process; Ni; deep X-ray lithography; eddy current loss; electroforming; fabrication; high-frequency characteristics; magnetic hysteresis; magnetic permeability; slit width; synchrotron radiation; thick film magnetic core; Eddy currents; Fabrication; Frequency; Magnetic cores; Magnetic hysteresis; Permeability; Strontium; Synchrotron radiation; Thick films; X-ray lithography;
Journal_Title :
Magnetics, IEEE Transactions on
