Analysis of multilayered thin-film piezoelectric transducer arrays

Author

Li, Hui ; Du, Hualong ; Xu, Limei ; Hu, Yuantai ; Fan, Hui ; Yang, Jiashi

Author_Institution

Inst. of Astronaut. & Aeronaut., Univ. of Electron. Sci. & Technol., Chengdu, China

Volume

56

Issue

11

fYear

2009

fDate

11/1/2009 12:00:00 AM

Firstpage

2571

Lastpage

2577

Abstract

We study coupled extensional and flexural vibrations of a 1-D array of partially electroded, multilayered piezoelectric transducers. The classical theory for laminated plates is used. A theoretical solution is obtained. Based on the solution, basic vibration characteristics of resonant frequencies, mode shapes, and admittance are calculated. Their dependence on geometric parameters is examined. The present analysis represents a significant progress of existing analyses on a single cell of a transducer array.

Keywords

multilayers; piezoelectric transducers; sensor arrays; thin film sensors; vibrations; multilayered thin-film piezoelectric transducer arrays; vibration characteristics; Aerospace engineering; Capacitive sensors; Civil engineering; Equations; Piezoelectric films; Piezoelectric transducers; Space technology; Tensile stress; Acoustics; Computer-Aided Design; Equipment Design; Equipment Failure Analysis; Membranes, Artificial; Micro-Electrical-Mechanical Systems; Reproducibility of Results; Sensitivity and Specificity; Transducers;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2009.1345

Filename

5306738