Title :
Hybrid p-element and Trefftz method for capacitance computation
Author :
Gyimesi, Miklos ; Wang, Jian-She ; Ostergaard, Dale
Author_Institution :
ANSYS Inc., Canonsburg, PA, USA
fDate :
9/1/2001 12:00:00 AM
Abstract :
The paper discusses efficient electrostatic field solutions techniques to simulate micro electro mechanical systems (MEMS): adaptive p-elements to remove the burden of manual mesh refinement; hybrid finite elements-Trefftz formulation to treat open boundary problems; energy based capacitance matrix and lumped capacitance value extraction
Keywords :
capacitance; finite element analysis; micromechanical devices; adaptive p-elements; capacitance; capacitance matrix; electrostatic field; hybrid finite elements-Trefftz method; microelectromechanical system; numerical simulation; open boundary problem; parameter extraction; Capacitance; Computational modeling; Dielectric substrates; Distributed computing; Electrostatics; Equations; Finite element methods; Mechanical systems; Microelectromechanical devices; Micromechanical devices;
Journal_Title :
Magnetics, IEEE Transactions on
