DocumentCode
1535632
Title
A New Physical
Noise Model for Double-Stack High-
Gate-Dielectric MOSFETs
Author
Song, Seung Hyun ; Choi, Hyun-Sik ; Baek, Rock-Hyun ; Choi, Gil-Bok ; Park, Min-Sang ; Lee, Kyung Taek ; Sagong, Hyun Chul ; Lee, Sang-Hyun ; Jung, Sung Woo ; Kang, Chang Yong ; Jeong, Yoon-Ha
Author_Institution
Dept. of Electron. & Electr. Eng., Pohang Univ. of Sci. & Technol., Pohang, South Korea
Volume
30
Issue
12
fYear
2009
Firstpage
1365
Lastpage
1367
Abstract
In this letter, a new physical 1/f noise model is developed for double-stack high-k dielectric MOSFETs. This new model modifies the trapping-time-constant term in multistack unified noise model. Conventional 1/f noise model is built on the simple square potential approximation which did not account the electric field dependence on trapping time constant. The new model takes into account of a resultant tunneling process from the actual sloped potential in order to eliminate the discrepancies of dielectric trap density on the dielectric thickness and the gate bias. Our model successfully predicts 1/f noise data obtained from SiO2/HfO2 double-stack high- k devices with various gate-dielectric thicknesses using a single set of modeling parameter.
Keywords
1/f noise; MOSFET; hafnium compounds; high-k dielectric thin films; semiconductor device noise; silicon compounds; tunnelling; 1-f noise model; SiO2-HfO2; dielectric thickness; dielectric trap density; double-stack high-k dielectric MOSFETs; gate bias; multistack unified noise model; square potential approximation; trapping time constant; tunneling; High-$k$ ; MOSFETs; low-frequency noise (LFN); modeling;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/LED.2009.2033721
Filename
5308319
Link To Document