• DocumentCode
    1536009
  • Title

    A Study on High-Speed and High-Precision Tracking Control of Large-Scale Stage Using Perfect Tracking Control Method Based on Multirate Feedforward Control

  • Author

    Saiki, Kazuaki ; Hara, Atsushi ; Sakata, Koichi ; Fujimoto, Hiroshi

  • Author_Institution
    Precision Equip. Co., Nikon Corp., Yokohama, Japan
  • Volume
    57
  • Issue
    4
  • fYear
    2010
  • fDate
    4/1/2010 12:00:00 AM
  • Firstpage
    1393
  • Lastpage
    1400
  • Abstract
    In hard-disk-drive control, the perfect tracking control (PTC) method has already obtained high performance. Therefore, the first author and his group study the PTC scheme for improving the performance of large-scale stages. This paper presents an application of the PTC scheme to the tracking control of two different stages. The results from both simulations and experiments show that the PTC method outperforms the conventional rigid-body-mode-based feedforward method.
  • Keywords
    disc drives; feedforward; hard discs; large-scale systems; tracking; hard-disk-drive control; large-scale stage; multirate feedforward control; perfect tracking control; rigid-body-mode-based feedforward method; tracking control method; High precision; high speed; motion control systems; positioning table;
  • fLanguage
    English
  • Journal_Title
    Industrial Electronics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0278-0046
  • Type

    jour

  • DOI
    10.1109/TIE.2009.2030212
  • Filename
    5308398
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1536009