DocumentCode
1536681
Title
Microsystems and I&M - mutual interest, demonstrated impact, and potential [Guest Editorial]
Author
Wolffenbuttel, R.F.
Volume
4
Issue
3
fYear
2001
Firstpage
6
Lastpage
6
Abstract
Presents the guest editorial for this issue of the publication.
Keywords
Chemical sensors; Chemical technology; Collaboration; Fabrication; Instrumentation and measurement; Instruments; Metrology; Micromechanical devices; Sensor systems; Silicon;
fLanguage
English
Journal_Title
Instrumentation & Measurement Magazine, IEEE
Publisher
ieee
ISSN
1094-6969
Type
jour
DOI
10.1109/MIM.2001.953452
Filename
953452
Link To Document