• DocumentCode
    1536681
  • Title

    Microsystems and I&M - mutual interest, demonstrated impact, and potential [Guest Editorial]

  • Author

    Wolffenbuttel, R.F.

  • Volume
    4
  • Issue
    3
  • fYear
    2001
  • Firstpage
    6
  • Lastpage
    6
  • Abstract
    Presents the guest editorial for this issue of the publication.
  • Keywords
    Chemical sensors; Chemical technology; Collaboration; Fabrication; Instrumentation and measurement; Instruments; Metrology; Micromechanical devices; Sensor systems; Silicon;
  • fLanguage
    English
  • Journal_Title
    Instrumentation & Measurement Magazine, IEEE
  • Publisher
    ieee
  • ISSN
    1094-6969
  • Type

    jour

  • DOI
    10.1109/MIM.2001.953452
  • Filename
    953452