Title :
Continuous-wave operation of InGaN multiple-quantum-well laser diodes on copper substrates obtained by laser liftoff
Author :
Kneissl, Michael ; Wong, William S. ; Treat, David W. ; Teepe, Mark ; Miyashita, Naoko ; Johnson, Noble M.
Author_Institution :
Electron. Mater. Lab., Xerox Palo Alto Res. Center, CA, USA
Abstract :
The performance characteristics of continuous-wave (CW) InGaN multiple-quantum-well (MQW) laser diodes on copper substrates are reported. InGaN MQW laser diodes (LDs) grown on sapphire substrates by metal-organic chemical vapor deposition were successfully separated from the sapphire and transferred onto copper substrates by using a two-step laser liftoff (LLO) process. Continuous-wave threshold currents as low as 65 mA have been achieved with threshold voltages of 6.5 V with a backside n-contact through the Cu substrate, improved heat dissipation due to the Cu substrate allowed CW laser operation up to a heatsink temperature of 80°C. Significant improvements in light output powers were observed for devices on Cu substrates with maximum CW output power of more than 100 mW
Keywords :
III-V semiconductors; MOCVD; cooling; copper; gallium compounds; indium compounds; laser beams; optical fabrication; quantum well lasers; ridge waveguides; substrates; waveguide lasers; 100 mW; 6.5 V; 65 mA; 80 C; Al2O3; CW MQW laser diodes; CW laser operation; Cu; Cu substrate; Cu substrates; InGaN; MQW laser diodes; backside n-contact; continuous-wave multiple-quantum-well laser diodes; continuous-wave operation; continuous-wave threshold currents; heat dissipation; heatsink temperature; laser liftoff; light output powers; maximum CW output power; metal-organic chemical vapor deposition; multiple-quantum-well laser diodes; performance characteristics; sapphire substrates; threshold voltages; two-step laser liftoff process; Chemical lasers; Chemical vapor deposition; Copper; Diode lasers; Gallium nitride; Light emitting diodes; Quantum well devices; Substrates; Thermal resistance; Threshold current;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/2944.954129