Intrinsic MOSFET capacitance coefficients

Intrinsic capacitance coefficients are derived for metal oxide semiconductor field effect (MOSFET) based on the inversion charge relation. A simple expression is obtained for the channel charge as a function of distance. Integrals for the proportionately partitioned source and drain-stored charges are obtained analytically. The resulting expressions are valid from deep subthreshold to strong inversion. A saturation charge q_mda is introduced that allows handling of short-channel effects. The capacitance coefficients have the required source/drain symmetry