Title :
The state of the art of electrostatic discharge protection: physics, technology, circuits, design, simulation, and scaling
Author :
Voldman, Steven H.
Author_Institution :
IBM Microelectron. Div., IBM Semicond. Res. & Dev. Center, Essex Junction, VT, USA
fDate :
9/1/1999 12:00:00 AM
Abstract :
This paper discusses state-of-the-art electrostatic discharge (ESD) protection in advanced semiconductor technologies and emerging technologies. ESD physics, semiconductor process issues, device and circuit simulation, circuits, and devices are examined
Keywords :
BiCMOS integrated circuits; CMOS integrated circuits; circuit CAD; circuit simulation; electrostatic discharge; integrated circuit design; integrated circuit modelling; integrated circuit technology; integrated circuit testing; protection; reviews; silicon-on-insulator; ESD physics; ESD protection; advanced semiconductor technologies; circuit simulation; device simulation; electrostatic discharge protection; scaling; semiconductor process issues; Circuit simulation; Electrostatic discharge; Integrated circuit interconnections; Isolation technology; MOSFET circuits; Physics; Protection; Silicon on insulator technology; Space vector pulse width modulation; Temperature;
Journal_Title :
Solid-State Circuits, IEEE Journal of
