DocumentCode
1538132
Title
Nano and micromechanical systems-fundamentals of nano and microengineering
Author
Shea, John
Volume
17
Issue
5
fYear
2001
Firstpage
59
Lastpage
59
Keywords
Books; Equations; Fabrication; Knowledge engineering; Mathematical model; Micromechanical devices; Nanoelectromechanical systems; Physics; Polymer films; Power engineering and energy;
fLanguage
English
Journal_Title
Electrical Insulation Magazine, IEEE
Publisher
ieee
ISSN
0883-7554
Type
jour
DOI
10.1109/MEI.2001.954590
Filename
954590
Link To Document