DocumentCode
1538522
Title
Ion charge state distributions of alloy-cathode vacuum arc plasmas
Author
Schülke, Thomas ; Anders, Andrè
Author_Institution
Fraunhofer Resource Centre Michigan, Ann Arbor, MI, USA
Volume
27
Issue
4
fYear
1999
fDate
8/1/1999 12:00:00 AM
Firstpage
911
Lastpage
914
Abstract
Ion charge state distributions (CSD´s) of alloy-cathode vacuum arc plasmas have been calculated under the assumption that thermodynamic equilibrium is valid in the vicinity of the cathode spot, and equilibrium CSD´s “freeze” when the plasma is rapidly expanding. In this way, experimental data of titanium-hafnium alloy-cathode plasmas have been simulated using a system of Saha equations generalized for multiple elements. It was found that the CSD´s of titanium and hafnium freeze approximately at the same plasma temperature and density. The freezing parameters depend slightly on the plasma composition. For the example considered, freezing occurs at temperature of T=3.0-3.8 eV and a total heavy particle density of order 1025m-3
Keywords
plasma density; plasma temperature; plasma thermodynamics; plasma-wall interactions; vacuum arcs; 3.0 to 3.8 eV; Saha equations; Ti-Hf; Ti-Hf plasma; alloy-cathode vacuum arc plasmas; cathode spot; chopping current; freezing; ion charge state distributions; multiple elements; multiply charged ions; plasma composition; plasma density; plasma temperature; rapidly expanding plasma; thermodynamic equilibrium; titanium-hafnium alloy-cathode plasmas; total heavy particle density; Cathodes; Electrons; Equations; Ionization; Plasma density; Plasma materials processing; Plasma simulation; Plasma temperature; Plasma waves; Vacuum arcs;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/27.782259
Filename
782259
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