• DocumentCode
    1538522
  • Title

    Ion charge state distributions of alloy-cathode vacuum arc plasmas

  • Author

    Schülke, Thomas ; Anders, Andrè

  • Author_Institution
    Fraunhofer Resource Centre Michigan, Ann Arbor, MI, USA
  • Volume
    27
  • Issue
    4
  • fYear
    1999
  • fDate
    8/1/1999 12:00:00 AM
  • Firstpage
    911
  • Lastpage
    914
  • Abstract
    Ion charge state distributions (CSD´s) of alloy-cathode vacuum arc plasmas have been calculated under the assumption that thermodynamic equilibrium is valid in the vicinity of the cathode spot, and equilibrium CSD´s “freeze” when the plasma is rapidly expanding. In this way, experimental data of titanium-hafnium alloy-cathode plasmas have been simulated using a system of Saha equations generalized for multiple elements. It was found that the CSD´s of titanium and hafnium freeze approximately at the same plasma temperature and density. The freezing parameters depend slightly on the plasma composition. For the example considered, freezing occurs at temperature of T=3.0-3.8 eV and a total heavy particle density of order 1025m-3
  • Keywords
    plasma density; plasma temperature; plasma thermodynamics; plasma-wall interactions; vacuum arcs; 3.0 to 3.8 eV; Saha equations; Ti-Hf; Ti-Hf plasma; alloy-cathode vacuum arc plasmas; cathode spot; chopping current; freezing; ion charge state distributions; multiple elements; multiply charged ions; plasma composition; plasma density; plasma temperature; rapidly expanding plasma; thermodynamic equilibrium; titanium-hafnium alloy-cathode plasmas; total heavy particle density; Cathodes; Electrons; Equations; Ionization; Plasma density; Plasma materials processing; Plasma simulation; Plasma temperature; Plasma waves; Vacuum arcs;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/27.782259
  • Filename
    782259