High T/sub c/ GdBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// superconducting thin film bolometers

Single element and 2/spl times/2 array bolometers have been prepared with GdBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// superconducting thin films on Zr(Y)O/sub 2/ single crystal substrates. The bolometers are meander type with line width and distance of 10 /spl mu/m, the effective area is /spl phi/ 0.8 mm or 0.8/spl times/0.8 mm/sup 2/. The resistance transition temperature of the films is higher than 90 K and the transition width is less than 2 K, after patterning by photolithography and wet etching. The substrate was ground and polished to about 0.05 mm in thickness for reducing heat capacitance and increasing the responsivity. The performances of the bolometers are NEP of 3.8/spl times/10/sup -12/ WHz/sup -1/2/, normalized detectivity D* of 1.7/spl times/10/sup 10/ cmHz/sup 1/2//W and responsivity Rv of 3300 V/W. These properties did not degrade after the bolometers were stored for 20 months under more than 40 warm-cold cycles. The properties of each element in the 2/spl times/2 array are comparable within 8%.