Title :
S-N-S weaklink junctions fabricated by nanometer lithography
Author :
Hirose, N. ; Ohta, H. ; Matsui, T. ; Fukuda, M.
Author_Institution :
Commun. Res. Lab., Minist. of Posts & Telecommun., Tokyo, Japan
fDate :
6/1/1997 12:00:00 AM
Abstract :
It is well known that the dimensions of the weak-link is the most important factor of its characteristics. However, the relationship between the dimensions and the characteristics of the weak-links are not clarified, because the geometrical dimensions are usually different from the effective dimensions, To clarify this relationship, we fabricated S-N-S (niobium as the superconductor and gold as the normal metal) weak-link junctions using electron beam lithography (EBL), reactive ion etching (RIE) and lift-off. The dimensions of the weak-links were controllable and the minimum width and length were 30 nm and 40 nm, respectively,.
Keywords :
Josephson effect; electron beam lithography; gold; niobium; sputter etching; superconducting junction devices; type II superconductors; 30 nm; 40 nm; Josephson junctions; Nb-Au-Nb; S-N-S weaklink junctions; electron beam lithography; geometrical dimensions; lift-off; nanometer lithography; reactive ion etching; Chromium; Electron beams; Etching; Fabrication; Gold; Josephson junctions; Lithography; Niobium; Sputtering; Substrates;
Journal_Title :
Applied Superconductivity, IEEE Transactions on