• DocumentCode
    1541174
  • Title

    Special Issue on Carbon-Related Materials Processing by Plasma Technologies

  • Author

    Yukimura, Ken ; Suda, Yoshiyuki

  • Author_Institution
    Nanoelectronics Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan
  • Volume
    40
  • Issue
    7
  • fYear
    2012
  • fDate
    7/1/2012 12:00:00 AM
  • Firstpage
    1781
  • Lastpage
    1782
  • Abstract
    The nine papers in this special issue focus on the topic of carbon related materials as they appy to plasma technologies.
  • Keywords
    Carbon; Materials processing; Plasma applications; Plasma materials processing; Special issues and sections;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2012.2201769
  • Filename
    6218204
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1541174