Title :
Special Issue on Carbon-Related Materials Processing by Plasma Technologies
Author :
Yukimura, Ken ; Suda, Yoshiyuki
Author_Institution :
Nanoelectronics Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan
fDate :
7/1/2012 12:00:00 AM
Abstract :
The nine papers in this special issue focus on the topic of carbon related materials as they appy to plasma technologies.
Keywords :
Carbon; Materials processing; Plasma applications; Plasma materials processing; Special issues and sections;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2012.2201769
