Title :
Technology for YBa/sub 2/Cu/sub 3/O/sub 7/ SNS- and SIS-Josephson junctions
Author :
Subke, K.-O. ; Krey, S. ; Burkhardt, H. ; Bartold, A. ; Schilling, M.
Author_Institution :
Inst. fur Angewandte Phys., Hamburg Univ., Germany
fDate :
6/1/1999 12:00:00 AM
Abstract :
Ramp-edge Josephson junctions from the high-temperature superconductor YBa/sub 2/Cu/sub 3/O/sub 7/ require a multilayer preparation process. In order to increase the reproducability of the junction characteristics we investigate the subprocesses using statistical methods for the design of experiments. The optimization of the process parameters enables us to prepare ramp-edge Josephson junctions with PrBa/sub 2/Cu/sub 3/O/sub 7/ as barrier material which exhibit tighter barriers. Adapting the growth conditions for YBa/sub 2/Cu/sub 3/O/sub 7/ on MgO films we prepared Josephson junctions with a 10 nm MgO barrier.
Keywords :
Josephson effect; barium compounds; design of experiments; high-temperature superconductors; superconducting thin films; superconductor-insulator-superconductor devices; superconductor-normal-superconductor devices; yttrium compounds; MgO; MgO barrier; PrBa/sub 2/Cu/sub 3/O/sub 7/; PrBa/sub 2/Cu/sub 3/O/sub 7/ barrier; SIS device; SNS device; YBa/sub 2/Cu/sub 3/O/sub 7/; YBa/sub 2/Cu/sub 3/O/sub 7/ thin film; design of experiments; high temperature superconductor; multilayer preparation; ramp-edge Josephson junction; statistical method; Argon; Etching; Hafnium; Plasma temperature; Pulsed laser deposition; Resists; Rough surfaces; Silver; Substrates; Surface roughness;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
