DocumentCode
154211
Title
Localization length of integrated multi-walled carbon nanotubes
Author
Fiedler, Holger ; Hermann, Simon ; Rennau, Michael ; Schulz, Stefan E. ; Gessner, T.
Author_Institution
Center for Microtechnologies (ZFM), Tech. Univ. Chemnitz, Chemnitz, Germany
fYear
2014
fDate
20-23 May 2014
Firstpage
159
Lastpage
162
Abstract
We prepared CNT based vias on wafer scale. Based on the electrical characterization we extracted the localization length of the CNTs. While for short CNTs the classical transport regime is valid, the Anderson localization regime applies for longer CNTs. Supplementary the characteristic length scales were estimated based on the structure of the CNTs being in good agreement with the parameters extracted from the electrical measurements.
Keywords
Anderson model; carbon nanotubes; integrated circuit interconnections; Anderson localization regime; C; CNT based vias; integrated multiwalled carbon nanotubes; localization length; Carbon nanotubes; Electrical resistance measurement; Integrated circuit interconnections; Materials; Resistance; Semiconductor device measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC), 2014 IEEE International
Conference_Location
San Jose, CA
Print_ISBN
978-1-4799-5016-4
Type
conf
DOI
10.1109/IITC.2014.6831852
Filename
6831852
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