Excess low-frequency flux noise in dc SQUIDs

We have fabricated dc superconducting quantum interference devices (SQUIDs) incorporating Nb/Al-oxide/Nb Josephson junctions in both stripline and washer geometries. Low-frequency noise in excess of that predicted by the resistively-shunted junction model is present in both geometries and is demonstrated to be flux noise. This flux noise is not environmental. Improvements in fabrication processing over the past four years have reduced the level of this flux noise. SQUIDs are now fabricated with PdAu resistors, Nb wiring layers, and SiO/sub 2/ interlayer dielectric. In our best well-coupled SQUIDs, the white-noise energy sensitivity is 5/spl times/10/sup -31/ J/spl middot/s, with a 1/f knee below 0.1 Hz. We believe further reduction in the flux noise might be obtained with the use of on-chip flux shielding and/or trapping structures.