Title :
An abuttable CCD imager for visible and X-ray focal plane arrays
Author :
Burke, Barry E. ; Mountain, Robert W. ; Harrison, David C. ; Bautz, Marshall W. ; Doty, John P. ; Ricker, George R. ; Daniels, Peter J.
Author_Institution :
MIT Lincoln Lab., Lexington, MA, USA
fDate :
5/1/1991 12:00:00 AM
Abstract :
A frame-transfer silicon charge-coupled-device (CCD) imager has been developed that can be closely abutted to other imagers on three sides of the imaging array. It is intended for use in multichip arrays. The device has 420×420 pixels in the imaging and frame-store regions and is constructed using a three-phase triple-polysilicon process. Particular emphasis has been placed on achieving low-noise charge detection for low-light-level imaging in the visible and maximum energy resolution for X-ray spectroscopic applications. Noise levels of 6 electrons at 1-MHz and less than 3 electrons at 100-kHz data rates have been achieved. Imagers have been fabricated on 1000-Ω cm material to maximize quantum efficiency and minimize split events in the soft X-ray regime
Keywords :
CCD image sensors; X-ray detection and measurement; X-ray spectrometers; 1 MHz; 100 kHz; 1000 ohmcm; 176400 pixel; 420 pixel; Si; X-ray focal plane arrays; abuttable CCD imager; data rates; energy resolution for X-ray; frame-store regions; frame-transfer; low-light-level imaging; low-noise charge detection; minimize split events; multichip arrays; noise levels; quantum efficiency; soft X-ray regime; three-phase triple-polysilicon process; visible light focal plane arrays; Charge coupled devices; Electrons; Energy resolution; Optical imaging; Pixel; Silicon; Spectroscopy; X-ray detection; X-ray detectors; X-ray imaging;
Journal_Title :
Electron Devices, IEEE Transactions on
