Bicrystal submicrometer Josephson junctions and dc SQUIDs

Author

Ijsselsteijn, R. ; Elsner, H. ; Morgenroth, W. ; Schultze, V. ; Meyer, H.-G.

Author_Institution

Dept. of Cryoelectron., Inst. for Phys. High Technol., Jena, Germany

Volume

9

Issue

2

fYear

1999

fDate

6/1/1999 12:00:00 AM

Firstpage

3933

Lastpage

3936

Abstract

Submicrometer Josephson junctions and dc SQUIDs with such junctions have been prepared on symmetrical 24/spl deg/ bicrystal substrates and were electrically characterized. The submicrometer structures are patterned using e-beam lithography and a C/Ti/e-beam resist mask system. Junctions with dimensions down to about 350 nm show no degradation of their superconducting properties at 77 K, when patterned at low temperatures. Series connections of directly coupled SQUIDs with large (110-160 pH) coupling-inductance, prepared with 0.5 /spl mu/m wide junctions show flux-to-voltage transfer function values up to 100 /spl mu/V//spl Phi//sub 0/. For these SQUIDs, typical white noise levels of 10 /spl mu//spl Phi//sub 0///spl radic/Hz are measured at 77 K.

Keywords

Josephson effect; SQUIDs; electron beam lithography; high-temperature superconductors; superconducting device noise; superconducting thin films; white noise; 0.5 micron; 350 nm; 77 K; bicrystal submicrometer Josephson junctions; coupling-inductance; dc SQUIDs; e-beam lithography; e-beam resist mask system; flux-to-voltage transfer function values; series connections; submicrometer structures; white noise levels; Degradation; Josephson junctions; Lithography; Noise measurement; Resists; SQUIDs; Superconducting device noise; Temperature; Transfer functions; White noise;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/77.783888

Filename

783888