Title :
A new fabrication technique for ultra-small diffusion-cooled hot-electron bolometers
Author :
Datesman, A.M. ; Zhang, J.Z. ; Lichtenberger, A.W.
Author_Institution :
Dept. of Electr. Eng., Virginia Univ., Charlottesville, VA, USA
fDate :
6/1/1999 12:00:00 AM
Abstract :
Hot-electron bolometers (HEBs) are becoming the technology of choice for heterodyne mixing in the short submillimeter wavelength regime (frequencies above 1 THz). In this paper, we describe a new, versatile, easily variable method of diffusion-cooled HEB fabrication using a focused-ion beam (FIB) microscope. This technique does not require electron-beam lithography or definition of the bolometer element by lift-off.
Keywords :
bolometers; focused ion beam technology; heterodyne detection; hot carriers; submillimetre wave mixers; superconducting microwave devices; superconducting mixers; bolometer element; diffusion-cooled HEB fabrication; diffusion-cooled hot-electron bolometers; focused-ion beam microscope; heterodyne mixing; short submillimeter wavelength regime; Bolometers; Chromium; Etching; Fabrication; Filters; Focusing; Gold; Niobium; Resists; Submillimeter wave technology;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
