Growth of NdBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// thin films and fabrication of directly coupled dc SQUID magnetometer

Author

Yong Ki Park ; Dong Han Ha ; In-Seen Kim ; Jong-Chul Park ; Yunsung Huh

Author_Institution

Korea Stand. & Sci. Res. Inst., Taejon, South Korea

Volume

7

Issue

2

fYear

1997

fDate

6/1/1997 12:00:00 AM

Firstpage

3351

Lastpage

3354

Abstract

Thin films of NdBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// were fabricated by off-axis rf sputtering and pulsed laser deposition (PLD) methods. The deposition parameters for thin film fabrication, such as gas pressure, substrate temperature, annealing conditions, and rf power or laser energy density were studied. Highly c-axis oriented thin films with the maximum T/sub c/ (R=0) of 87 K were obtained at the optimum deposition conditions of rf sputtering. It, however, was more difficult to optimize the PLD conditions. The directly coupled dc SQUIDs were fabricated on SrTiO/sub 3/ bi-crystal substrates using single layer NdBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// film grown by PLD method.

Keywords

SQUID magnetometers; barium compounds; high-temperature superconductors; neodymium compounds; pulsed laser deposition; sputter deposition; superconducting thin films; NdBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// thin film growth; NdBa/sub 2/Cu/sub 3/O/sub 7/; RF sputtering; SrTiO/sub 3/ bicrystal substrate; annealing; critical temperature; directly coupled DC SQUID magnetometer; fabrication; pulsed laser deposition; Annealing; Gas lasers; Optical device fabrication; Optical pulses; Power lasers; Pulsed laser deposition; SQUIDs; Sputtering; Substrates; Temperature;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/77.622085

Filename

622085