Novel CCD-based pH imaging sensor

Author

Sawada, Kazuaki ; Mimura, Susumu ; Tomita, Katsuhiko ; Nakanishi, Tsuyoshi ; Tanabe, Hiroki ; Ishida, Makoto ; Ando, Takao

Author_Institution

Dept. of Electr. & Electron. Eng., Toyohashi Univ. of Technol., Japan

Volume

46

Issue

9

fYear

1999

fDate

9/1/1999 12:00:00 AM

Firstpage

1846

Lastpage

1849

Abstract

We propose and demonstrate a novel pH imaging sensor based on the Charge Coupled Device (CCD) technology. This device consists of pH sensing parts, which sense pH value and transform a pH value to electric charges, and conventional CCD parts, which transfer the electric charges to read out circuit. A thin Si₃N₄ film which acts as the hydrogen ion-sensitive membrane was used in the pH sensing film. The prototype devices were fabricated and was confirmed the device operation using pH equivalent voltages. It was found that the output signal from the imaging sensor was lineally changed from pH 0 to 14 and successfully observed a pH image on a black and white TV monitor

Keywords

CCD image sensors; electrochemical sensors; pH measurement; silicon compounds; CCD; Si₃N₄; TV monitor; hydrogen ion-sensitive membrane; pH equivalent voltages; pH imaging sensor; thin Si₃N₄ film; Biomembranes; Charge coupled devices; Charge-coupled image sensors; Circuits; Hydrogen; Image sensors; Prototypes; Semiconductor films; TV; Voltage;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/16.784183

Filename

784183