Title :
Novel CCD-based pH imaging sensor
Author :
Sawada, Kazuaki ; Mimura, Susumu ; Tomita, Katsuhiko ; Nakanishi, Tsuyoshi ; Tanabe, Hiroki ; Ishida, Makoto ; Ando, Takao
Author_Institution :
Dept. of Electr. & Electron. Eng., Toyohashi Univ. of Technol., Japan
fDate :
9/1/1999 12:00:00 AM
Abstract :
We propose and demonstrate a novel pH imaging sensor based on the Charge Coupled Device (CCD) technology. This device consists of pH sensing parts, which sense pH value and transform a pH value to electric charges, and conventional CCD parts, which transfer the electric charges to read out circuit. A thin Si3N4 film which acts as the hydrogen ion-sensitive membrane was used in the pH sensing film. The prototype devices were fabricated and was confirmed the device operation using pH equivalent voltages. It was found that the output signal from the imaging sensor was lineally changed from pH 0 to 14 and successfully observed a pH image on a black and white TV monitor
Keywords :
CCD image sensors; electrochemical sensors; pH measurement; silicon compounds; CCD; Si3N4; TV monitor; hydrogen ion-sensitive membrane; pH equivalent voltages; pH imaging sensor; thin Si3N4 film; Biomembranes; Charge coupled devices; Charge-coupled image sensors; Circuits; Hydrogen; Image sensors; Prototypes; Semiconductor films; TV; Voltage;
Journal_Title :
Electron Devices, IEEE Transactions on
