Characterization of poly(phenylsilsesquioxane) thin-film planar optical waveguides

Author

Brown, K.S. ; Taylor, B.J. ; Hornak, L.A. ; Weidman, T.W.

Author_Institution

Dept. of Electr. & Comput. Eng., West Virginia Univ., Morgantown, WV, USA

Volume

9

Issue

6

fYear

1997

fDate

6/1/1997 12:00:00 AM

Firstpage

791

Lastpage

793

Abstract

Characterization results of thin-film poly(phenylsilsesquioxane) (PPSQ) planar-optical waveguides are presented. Results of absorption spectrum, refractive index, thermal stress effect, and waveguide loss measurements performed on 1-2 μm PPSQ films indicate this silicon backbone polymer to be a strong potential candidate for optical waveguide integration within microelectronic systems. PPSQ films are shown to exhibit thermal stability with respect to volume, refractive index, and optical loss for temperatures up to 400/spl deg/C. The first TE mode of PPSQ planar optical waveguides between 1.32 and 1.72 μm in thickness fabricated on 5-μm HiPOX Si wafers exhibited optical loss of 0.16 dB/cm at 632.8 mn.

Keywords

infrared spectra; optical films; optical losses; optical planar waveguides; optical polymers; polymer films; refractive index; thermal stability; thermal stresses; ultraviolet spectra; visible spectra; 0.16 dB; 1 to 2 mum; 1.32 to 1.72 mum; 250 to 1450 nm; 400 degC; 5 mum; 632.8 nm; HiPOX Si wafers; PPSQ films; Si; absorption spectrum; first TE mode; microelectronic systems; optical loss; optical waveguide integration; poly(phenylsilsesquioxane) thin-film planar optical waveguides; refractive index; silicon backbone polymer; thermal stability; thermal stress effect; volume; waveguide loss measurements; Optical films; Optical losses; Optical planar waveguides; Optical polymers; Optical refraction; Optical variables control; Optical waveguides; Planar waveguides; Polymer films; Refractive index;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.584992

Filename

584992