DocumentCode :
1545649
Title :
Lithographic technology for microwave integrated circuits
Author :
Shepherd, P.R. ; Evans, P.S.A. ; Ramsey, B.J. ; Harrison, D.J.
Author_Institution :
Sch. of Electron. & Electr. Eng., Bath Univ., UK
Volume :
33
Issue :
6
fYear :
1997
fDate :
3/13/1997 12:00:00 AM
Firstpage :
483
Lastpage :
484
Abstract :
Conductive lithographic films (CLFs) have been developed primarily as substitutes for resin/laminate boards, which share properties with the metallisation patterns used in planar microwave integrated circuits (MICs). The authors examine the microwave properties of the films and show that, although the losses are greater, they have potential as an alternative to the traditional manufacturing process of MICs
Keywords :
integrated circuit metallisation; lithography; microwave integrated circuits; conductive lithographic film; loss; manufacturing; metallisation; planar microwave integrated circuit;
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el:19970360
Filename :
585055
Link To Document :
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