DocumentCode
1545707
Title
Yield theory for diode laser fabrication
Author
Wu, Y.A. ; Chang-Hasnain, C.J.
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
Volume
33
Issue
6
fYear
1997
fDate
3/13/1997 12:00:00 AM
Firstpage
496
Lastpage
497
Abstract
A novel yield model is derived and is shown to agree extremely well with experimental data. It provides an accurate tool with physical insights to obtain yield distribution and to determine the number of key quality limiting factors for future improvements
Keywords
quality control; semiconductor device manufacture; semiconductor device models; semiconductor lasers; surface emitting lasers; VCSELs; diode laser fabrication; physical insights; quality limiting factors; yield distribution; yield model;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19970352
Filename
585063
Link To Document