Low turn-on voltage field emission triodes with selective growth of carbon nanotubes

Author

Chen, Kevin J. ; Hong, W.K. ; Lin, C.P. ; Chen, K.H. ; Chen, L.C. ; Cheng, H.C.

Author_Institution

Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan

Volume

22

Issue

11

fYear

2001

Firstpage

516

Lastpage

518

Abstract

A low turn-on voltage, field emission triode array has been fabricated using the selective deposition of carbon nanotubes (CNTs) in a microwave plasma chemical vapor deposition (MPCVD) system. The field emission triodes exhibited a low turn-on voltage of 13 V and a large emission current of 23 μA with the gate voltage at 60 V. Short-term stress reveals a 10% current fluctuation within 1800 sec. The excellent electric properties suggest that the array shows potential for application in field emission displays and vacuum microelectronics.

Keywords

carbon nanotubes; electron field emission; plasma CVD coatings; triodes; vacuum microelectronics; 13 V; 23 muA; C; carbon nanotube; current fluctuation; field emission display; field emission triode array; microwave plasma chemical vapor deposition; selective growth; turn-on voltage; vacuum microelectronics; Carbon nanotubes; Chemical vapor deposition; Flat panel displays; Fluctuations; Low voltage; Microelectronics; Microwave antenna arrays; Plasma chemistry; Plasma properties; Stress;

fLanguage

English

Journal_Title

Electron Device Letters, IEEE

Publisher

ieee

ISSN

0741-3106

Type

jour

DOI

10.1109/55.962648

Filename

962648