Title :
Josephson junctions fabricated by oxygen ion irradiation of YBa/sub 2/Cu/sub 3/O/sub 7-x/ thin films
Author :
Hollkott, J. ; Hu, S. ; Becker, C. ; Auge, J. ; Spangenberg, B. ; Kurz, H. ; Zakharov, N.D. ; Hesse, D. ; Hollander, B.
Author_Institution :
Inst. fur Halbleitertech., Aachen, Germany
fDate :
6/1/1997 12:00:00 AM
Abstract :
Ion irradiated microbridges are an interesting type of Josephson junction, because their technological requirements can be very low. In this paper a specialized fabrication process and the electrical characterization of the fabricated devices are reported on. The I/sub C/R/sub N/ product at 77 K is about 24 /spl mu/V. The phase coherence was proven by measurements on DC-SQUIDs made of these junctions. To get a deeper insight of the damage produced by ion irradiation, YBa/sub 2/Cu/sub 3/O/sub 7-x/, thin films have been investigated by high resolution transmission electron microscopy (HRTEM) and Rutherford backscattering spectroscopy (RBS).
Keywords :
Josephson effect; Rutherford backscattering; SQUIDs; barium compounds; critical currents; high-temperature superconductors; ion beam effects; superconducting device testing; superconducting microbridges; superconducting thin films; transmission electron microscopy; yttrium compounds; 77 K; DC-SQUIDs; HRTEM; I/sub C/R/sub N/ product; Josephson junction fabrication; O ion irradiation; RBS; Rutherford backscattering spectroscopy; YBa/sub 2/Cu/sub 3/O/sub 7-x/ thin films; YBa/sub 2/Cu/sub 3/O/sub 7/; electrical characterization; high resolution transmission electron microscopy; ion irradiated microbridges; ion irradiation damage; phase coherence; Fabrication; Josephson junctions; Oxygen; Sputtering; Superconducting epitaxial layers; Superconducting magnets; Superconducting materials; Superconducting thin films; Transistors; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
