Title :
Design and test of 3 GHz, fundamental mode surface transverse wave resonators on quartz
Author :
Bigler, Emmanuel ; Gavignet, Eric ; Ballandras, Sylvain ; Denissenko, Serguei ; Cambril, Edmond
Author_Institution :
Lab. de Phys. et Metrol. des Oscillateurs, CNRS, Besancon, France
fDate :
3/1/1997 12:00:00 AM
Abstract :
Surface transverse wave (STW) resonators, based on the propagation of high velocity shear horizontal waves on Y-rotated quartz were designed, fabricated and tested. A model is presented to predict the resonant frequency of a 3-grating structure as a function of design parameters such as periodicities, metal thickness, and finger-to-gap ratio. Experimental devices have been fabricated by direct e-beam lithography with linewidth geometries in the range of 0.3-0.5 /spl mu/m, and an operating frequency close to 3 GHz in fundamental mode. Two different designs using either a quasi synchronous structure (type 1) or a change of periodicity inside the cavity (type 2) were tested. The best experimental factor of merit is close to the best results already published for quartz STW resonators.
Keywords :
Q-factor; acoustic microwave devices; electron beam lithography; quartz; surface acoustic wave resonators; 0.3 to 0.5 mum; 3 GHz; 3-grating structure; Q-factor; SiO/sub 2/; Y-rotated quartz; cavity periodicity change; direct e-beam lithography; factor of merit; finger-to-gap ratio; fundamental mode surface transverse wave resonators; high velocity shear horizontal wave propagation; insertion losses; linewidth geometries; metal thickness; operating frequency; periodicities; piezoelectric model; quasi synchronous structure; resonant frequency; resonator design; resonator fabrication; resonator test; Associate members; Frequency; Geometry; Lithography; Oscillators; Predictive models; Resonance; Strips; Surface waves; Testing;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
