DocumentCode
1546240
Title
Amorphous silicon thin-film transistors on compliant polyimide foil substrates
Author
Gleskova, H. ; Wagner, S.
Author_Institution
Dept. of Electr. Eng., Princeton Univ., NJ, USA
Volume
20
Issue
9
fYear
1999
Firstpage
473
Lastpage
475
Abstract
Much of the mechanical strain in semiconductor devices can be relieved when they are made on compliant substrates. We demonstrate this strain relief with amorphous silicon thin-film transistors made on 25-μm thick polyimide foil, which can be bent to radii of curvature R down to 0.5 mm without substantial change in electrical characteristics.
Keywords
amorphous semiconductors; elemental semiconductors; foils; polymer films; silicon; substrates; thin film transistors; Si; amorphous silicon thin film transistor; compliant polyimide foil substrate; electrical characteristics; mechanical strain relief; radius of curvature; semiconductor device; Amorphous silicon; Capacitive sensors; Glass; Plasma temperature; Plastics; Polyimides; Sensor arrays; Silicon compounds; Substrates; Thin film transistors;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/55.784456
Filename
784456
Link To Document