DocumentCode :
1546442
Title :
Packaging using microelectromechanical technologies and planar components
Author :
Takahashi, Kazuaki ; Sangawa, Ushio ; Fujita, Suguru ; Matsuo, Michiaki ; Urabe, Takeharu ; Ogura, Hiroshi ; Yabuki, Hiroyuki
Author_Institution :
Mobile Commun. Res. Lab., Matsushita Res. Inst. Tokyo Inc., Kawasaki, Japan
Volume :
49
Issue :
11
fYear :
2001
fDate :
11/1/2001 12:00:00 AM
Firstpage :
2099
Lastpage :
2104
Abstract :
A novel millimeter-wave packaging structure was developed in which a micromachined low-loss planar component and flip-chip devices were integrated on a silicon substrate. A low-loss planar filter was achieved on a 7-mm-square silicon substrate employing an inverted microstrip line and a unique resonator. High attenuation in the stopband was also obtained by introducing a pole control technique. Fabrication of a compact K-band receiver front-end incorporating a built-in filter was realized using multilayered benzocyclobutene (BCB) and flip-chip bonding techniques. Furthermore, we propose an alternative BCB suspended structure and demonstrate a planar antenna for Ka-band applications. These technologies bring to reality high-performance compact packaged systems in millimeter-wave region applications
Keywords :
flip-chip devices; micromachining; micromechanical devices; millimetre wave devices; packaging; BCB suspended structure; K-band receiver front-end; Ka-band planar antenna; Si; benzocyclobutene multilayer; built-in filter; dual-mode ring resonator; flip-chip bonding; inverted microstrip line; low-loss planar filter; microelectromechanical technology; micromachining; millimeter-wave packaging; planar component; pole control; silicon substrate; stopband attenuation; Attenuation; Bonding; Fabrication; K-band; Microstrip filters; Microstrip resonators; Millimeter wave technology; Packaging; Resonator filters; Silicon;
fLanguage :
English
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9480
Type :
jour
DOI :
10.1109/22.963143
Filename :
963143
Link To Document :
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