Title :
A perturbation method for modeling the thermal sensitivity of surface transverse waves
Author :
Gavignet, E. ; Ballandras, Sylvain ; Bigle, E.
Author_Institution :
Lab. de Phys. et Metrologie des Oscillateurs, Univ. de Franche-Comte, Besancon, France
Abstract :
A perturbation approach has been developed to predict the sensitivity of surface transverse waves (STW) to quasi-static temperature effects. This approach is based on the combination of unperturbed STW characteristics and thermoelastic properties of the substrate. The unperturbed STW parameters are calculated taking piezoelectricity into account. Both cases of STW propagating under shallow groove or thin metal strip gratings are studied. An analytical expression of the first order temperature coefficient is obtained in the case of grooves. A simplified calculation is proposed for thin metal strip grating devices. Results are compared to available experimental data. Possible improvements of this model are finally discussed.
Keywords :
perturbation theory; surface acoustic waves; thermoelasticity; groove; metal strip grating; perturbation model; piezoelectric substrate; quasi-static temperature effects; surface transverse waves; thermal sensitivity; thermoelastic properties; Associate members; Frequency; Gratings; Perturbation methods; Predictive models; Strips; Surface waves; Temperature sensors; Thermal stresses; Thermoelasticity;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on