• DocumentCode
    1546972
  • Title

    Extreme ultraviolet lithography: will it be ready in time?

  • Author

    Hutcheson, G.D.

  • Author_Institution
    VLSI Research Inc.
  • Volume
    38
  • Issue
    11
  • fYear
    2001
  • Firstpage
    15
  • Lastpage
    16
  • Keywords
    Laser modes; Lithography; Manufacturing; Mirrors; Photonic integrated circuits; Silicon; Synchrotrons; Ultraviolet sources; Very large scale integration; X-ray lasers;
  • fLanguage
    English
  • Journal_Title
    Spectrum, IEEE
  • Publisher
    ieee
  • ISSN
    0018-9235
  • Type

    jour

  • DOI
    10.1109/MSPEC.2001.963237
  • Filename
    963237
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1546972