In-situ monitoring during PLD of YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// using RHEED at high oxygen pressure

Author

Rijnders, G.J.H.M. ; Koster, G. ; Blank, D.H.A. ; Rogalla, H.

Author_Institution

Dept. of Appl. Phys., Twente Univ., Enschede, Netherlands

Volume

9

Issue

2

fYear

1999

fDate

6/1/1999 12:00:00 AM

Firstpage

1547

Lastpage

1550

Abstract

The surface morphology and initial growth of YBa/sub 2/Cu/sub 3/O/sub u-/spl delta//, using Pulsed Laser Deposition (PLD), have been subject to in many studies. Both, Scanning Probe Microscopy (SPM) as well as Reflection High Energy Electron Diffraction (RHEED) have been applied. The latter is mostly operated using modified deposition parameters, like a reduced oxygen pressure. Here, we have studied the initial growth using a PLD-RHEED system at standard PLD pressures. In this system, in-situ RHEED can be applied in a background pressure of oxygen up to 50 Pa. The initial growth of YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// on SrTiO/sub 3/ substrates is studied. The influence of the substrate termination, i.e., SrO or TiO/sub 2/, on the growth will be discussed.

Keywords

barium compounds; high-temperature superconductors; pulsed laser deposition; reflection high energy electron diffraction; superconducting thin films; surface composition; surface topography; yttrium compounds; RHEED; SrTiO/sub 3/; YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta//; YBa/sub 2/Cu/sub 3/O/sub 7/; high temperature superconductor; initial growth; modified deposition parameters; pulsed laser deposition; substrate termination; surface morphology; Diffraction; Electrons; Monitoring; Optical pulses; Optical reflection; Oxygen; Pulsed laser deposition; Scanning probe microscopy; Substrates; Surface morphology;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/77.784689

Filename

784689