Title :
Doping study of superconductivity in YBCO films by ion implantation
Author :
Hong, S.H. ; Xu, H. ; Gao, E. ; Sahba, S. ; Ma, Q.Y.
Author_Institution :
Dept. of Electr. Eng., Columbia Univ., New York, NY, USA
fDate :
6/1/1999 12:00:00 AM
Abstract :
We present the results of doping by ion implantation in YBCO films with 5 different ions (Ca, Na, Mg, Be, Li). Ion selection is based on the difference of ionic radii and heat of formation value. Ionic radii plays a critical role to crystal damage in the implantation process. Ni ions were implanted to YBCO films with different doses so that the resistance of the implanted film was varied. Different values of resistance of the Ni implanted structures were applied to the fabrication of chip resistors.
Keywords :
barium compounds; high-temperature superconductors; ion beam effects; ion implantation; superconducting integrated circuits; superconducting thin films; yttrium compounds; HTSC; Ni implanted structures; YBaCuO films; YBaCuO:Be; YBaCuO:Ca; YBaCuO:Li; YBaCuO:Mg; YBaCuO:Na; YBaCuO:Ni; chip resistors; crystal damage; fabrication; heat of formation; ion implantation; ion selection; ionic radii; superconductivity; Doping; High temperature superconductors; Ion implantation; Magnetic materials; Optical materials; Semiconductor materials; Superconducting films; Superconducting materials; Superconductivity; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
