Title :
Deposition of c-oriented borocarbide thin films by laser ablation technique
Author :
Cimberle, M.R. ; Ferdeghini, C. ; Grassano, G. ; Marre, D. ; Pallecchi, I. ; Putti, M. ; Siri, A.S. ; Canepa, F.
Author_Institution :
INFM/CNR, Genova, Italy
fDate :
6/1/1999 12:00:00 AM
Abstract :
Despite the long period of time elapsed since their discovery, intermetallic superconducting borocarbides in the form of thin films are rarely reported in the literature. In this paper we present our results on the growth of ErNi/sub 2/B/sub 2/C thin films by an ultra high vacuum laser ablation technique. The dependence of the film structure and properties on the deposition parameters has been studied and optimized. Strongly c-oriented superconducting films (rocking angle of 1/spl deg/) with a rather smooth surface have been obtained. Here we present the details of the deposition procedure as well as those of the structural, morphological, and electrical characterization. The feasibility of superconducting films with a tungsten buffer layer on MgO substrate has been studied successfully. Both buffer layers and bilayers have been characterized by X-ray reflectivity and atomic force microscopy.
Keywords :
X-ray reflection; atomic force microscopy; erbium compounds; nickel compounds; pulsed laser deposition; superconducting materials; superconducting thin films; superconducting transition temperature; ErNi/sub 2/B/sub 2/C; ErNi/sub 2/B/sub 2/C thin films; MgO; MgO substrate; W; W buffer layer; X-ray reflectivity; atomic force microscopy; bilayers; c-oriented borocarbide thin films; deposition; electrical characterization; film structure; growth; intermetallic superconducting borocarbides; laser ablation technique; morphological characterization; properties; ultra high vacuum laser ablation; Atomic force microscopy; Buffer layers; Intermetallic; Laser ablation; Sputtering; Superconducting films; Superconducting thin films; Surface morphology; Tungsten; Vacuum technology;
Journal_Title :
Applied Superconductivity, IEEE Transactions on