Title :
High growth rate deposition techniques for coated conductors: liquid phase epitaxy and vapor-liquid-solid growth
Author :
Hirabayashi, I. ; Yoshida, Y. ; Yamada, Y. ; Koike, Y. ; Matsumoto, K.
Author_Institution :
Supercond. Res. Lab., ISTEC, Nagoya, Japan
fDate :
6/1/1999 12:00:00 AM
Abstract :
High growth rate deposition techniques for coated conductors are developed via liquid phase epitaxy (LPE) and vapor-liquid-solid (VLS) growth. By adding fluorine and silver under low oxygen partial pressure, the processing temperature of LPE decreased down to 850/spl deg/C and it enabled us to grow YBCO on metallic substrates such as cube-textured silver tapes. On the other hand, VLS growth is a combinatorial deposition technique between vapor growth and LPE. It is essentially a LPE growth supplied from the vapor phase. Here, we discuss the utilization of VLS growth as a rapid vapor growth for production of YBCO coated conductor.
Keywords :
barium compounds; high-temperature superconductors; liquid phase epitaxial growth; superconducting epitaxial layers; superconducting thin films; yttrium compounds; 850 C; LPE growth; YBCO coated conductor; YBa/sub 2/Cu/sub 3/O/sub 7/; coated conductors; high growth rate deposition techniques; high temperature superconductor; liquid phase epitaxy; vapor-liquid-solid growth; Conductors; Epitaxial growth; Laboratories; Silver; Solvents; Substrates; Superconductivity; Temperature; Thick films; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
