DocumentCode

1548226

Title

Correction To "Scratch Drive Actuator With Mechanical Links For Self-assembly Of Three-dimensional MEMS"

Author

Terunobu Akiyama ; Collard, Dominique ; Fujita, Hiroyuki

Author_Institution

Institute of Industrial Science, The University of Tokyo

Volume

6

Issue

2

fYear

1997

fDate

6/1/1997 12:00:00 AM

Firstpage

179

Lastpage

179

Keywords

Actuators; Laboratories; Self-assembly;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.1997.585796

Filename

585796