Title :
Properties of Bi-Sr-Ca-Cu-O (2212) films deposited by sputtering on tilted substrates
Author :
Moriya, M. ; Okamoto, T. ; Usami, K. ; Kobayashi, T. ; Goto, T.
Author_Institution :
Univ. of Electro-Commun., Tokyo, Japan
fDate :
6/1/1999 12:00:00 AM
Abstract :
Bi-Sr-Ca-Cu-O (2212) thin films have been deposited on tilted SrTiO/sub 3/ substrates using a dc sputtering system. These films have been deposited at 710-790/spl deg/C. The thickness of these films is about 170 nm. The films deposited at 730, 750 and 770/spl deg/C exhibit superconductivity, and the highest value of critical temperature is about 70 K for the film deposited at 750/spl deg/C. The crystal structure of this film has also been investigated by X-ray diffraction with c-axis oriented 2212 phase.
Keywords :
X-ray diffraction; bismuth compounds; calcium compounds; crystal structure; high-temperature superconductors; sputter deposition; strontium compounds; superconducting thin films; superconducting transition temperature; 710 to 790 degC; Bi/sub 2/Sr/sub 2/CaCu/sub 2/O; DC sputtering; SrTiO/sub 3/; X-ray diffraction; critical temperature; crystal structure; thickness; thin films; tilted SrTiO/sub 3/ substrates; Josephson junctions; Metalworking machines; Powders; Resistance heating; Sputtering; Substrates; Superconducting films; Superconducting thin films; Surface morphology; Temperature;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
