Low-cost combustion chemical vapor deposition of epitaxial buffer layers and superconductors

Author

Shoup, S.S. ; Shanmugham, S. ; Cousins, D. ; Hunt, A.T. ; Paranthaman, M. ; Goyal, A. ; Martin, P. ; Kroeger, D.M.

Author_Institution

MicroCoating Technol. Inc., Chamblee, GA, USA

Volume

9

Issue

2

fYear

1999

fDate

6/1/1999 12:00:00 AM

Firstpage

2426

Lastpage

2429

Abstract

A new low-cost, open-atmosphere deposition technique, combustion chemical vapor deposition (CCVD) is used to deposit epitaxial buffer layers and high-temperature superconductors on oxide single-crystal substrates. The CCVD process has the potential for manufacturing buffer layers and superconductors onto textured metal substrates in a continuous reel-to-reel production. CCVD does not use vacuum equipment or reaction chambers required by conventional techniques, while its coating quality rivals and even exceeds that of conventional methods. Compounds being studied with the CCVD process include the buffer layers cerium oxide (CeO/sub 2/), yttria stabilized zirconia (YSZ), strontium titanate (SrTiO/sub 3/), lanthanum aluminate (LaAlO/sub 3/), yttria (Y/sub 2/O/sub 3/), and ytterbium oxide (Yb/sub 2/O/sub 3/) and two rare earth superconductors, YBa/sub 2/Cu/sub 3/O/sub 7-x/, (YBCO) and YbBa/sub 2/Cu/sub 3/O/sub 7-x/ (YbBCO).

Keywords

barium compounds; cerium compounds; chemical vapour deposition; combustion synthesis; high-temperature superconductors; lanthanum compounds; strontium compounds; ytterbium compounds; yttrium compounds; zirconium compounds; CCVD process; CeO/sub 2/; LaAlO/sub 3/; SrTiO/sub 3/; Y/sub 2/O/sub 3/; Y/sub 2/O/sub 3/-ZrO/sub 2/; YBa/sub 2/Cu/sub 3/O/sub 7-x/; YBa/sub 2/Cu/sub 3/O/sub 7/; YSZ; Yb/sub 2/O/sub 3/; YbBa/sub 2/Cu/sub 3/O/sub 7-x/; YbBa/sub 2/Cu/sub 3/O/sub 7/; coating quality; continuous reel-to-reel production; epitaxial buffer layers; high-temperature superconductors; low-cost combustion chemical vapor deposition; open-atmosphere deposition technique; oxide single-crystal substrates; textured metal substrates; yttria stabilized zirconia; Buffer layers; Cerium; Chemical vapor deposition; Coatings; Combustion; Continuous production; High temperature superconductors; Manufacturing processes; Substrates; Vacuum technology;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/77.784963

Filename

784963