Title :
Nanoscale Optical Dielectric Rod Antenna for On-Chip Interconnecting Networks
Author :
Zhou, Hongyu ; Chen, Xi ; Espinoza, David S. ; Mickelson, Alan ; Filipovic, Dejan S.
Author_Institution :
Dept. of Electr., Comput., & Energy Eng., Univ. of Colorado, Boulder, CO, USA
Abstract :
A nanoscale on-chip optical dielectric rod antenna is demonstrated in this paper. The antenna is designed and fabricated on a 200-mm silicon-on-insulator platform, using IMEC 193-nm-deep UV lithography. A 500-nm-thick polymer layer is designed and deposited to act as an asymmetric slab waveguide, confining the radiated wave within the layer. Full-wave analysis predicts antenna return loss above 25 dB, and end-fire gain greater than 9 dBi from 172 to 222 THz. Six antenna pairs with 1-, 3-, 5-, 7-, 12-, and 17- μm separations are fabricated. Corresponding transmissions are measured from 190 to 200 THz. Two on-chip optical signal hubs composed of 16 and 32 antennas designed for core-to-core interconnection for the next-generation multicore microprocessors are also demonstrated. Good agreement between the modeling and measurement is obtained.
Keywords :
antennas; dielectric devices; integrated circuit interconnections; nanoelectromechanical devices; nanotechnology; silicon-on-insulator; terahertz wave devices; ultraviolet lithography; waveguides; IMEC; UV lithography; asymmetric slab waveguide; frequency 172 THz to 222 THz; nanoscale on-chip optical dielectric rod antenna; on-chip interconnecting networks; silicon-on-insulator platform; size 193 nm; size 200 mm; size 500 nm; Antenna measurements; Optical device fabrication; Optical interconnections; Optical waveguides; System-on-a-chip; Transmitting antennas; Dielectric rod antenna; nanoantennas; nanointerconnect; on-chip antenna; optical antenna; silicon photonics; silicon-on-insulator (SOI) wafer;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.2011.2156423
