DocumentCode :
1549994
Title :
Characteristics of Extended Nonthermal Plasma Source Based on a One-Dimensional DBD in a Narrow Gap of 100–200 \\mu\\hbox {m}
Author :
Akishev, Yuri ; Grushin, Mikhail ; Karalnik, Vladimir ; Petryakov, Alex ; Supiot, Philippe ; Trushkin, Nikolay
Author_Institution :
State Res. Center, Russian Federation Troitsk Inst. of Innovative & Thermonucl. Res., Troitsk, Russia
Volume :
39
Issue :
11
fYear :
2011
Firstpage :
2110
Lastpage :
2111
Abstract :
An extended 1-D dielectric-barrier discharge (DBD) in a very narrow gap generates nonthermal microplasma at higher pressure and is attractive for surface technologies in that the predefined volumes with submillimeter linear dimensions can be locally activated and treated. Such a discharge has been designed with the use of a thin blade placed very closely over a plane-barrier electrode. The search on the characteristics of the linear DBD in He powered by midfrequency alternating-current voltages is performed. The images of microplasma properties typical for this reactor are presented.
Keywords :
helium; plasma chemistry; plasma diagnostics; surface discharges; He; dielectric-barrier discharge; extended nonthermal plasma source; microplasma properties; midfrequency alternating-current voltages; nonthermal microplasma; one-dimensional DBD; plane-barrier electrode; size 100 mum to 200 mum; surface technologies; thin blade; Blades; Discharges; Electrodes; Helium; Inductors; Surface discharges; Temperature measurement; Plasma applications; plasma chemistry; plasma devices; plasma diagnostics; plasma sources;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.2011.2148731
Filename :
5871332
Link To Document :
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