Title :
Apparatus for measuring the capacitance-voltage characteristics of semiconductor devices with an extended frequency range
Author :
Sergeev, V.A. ; Frolov, I.V. ; Mukhometzianov, R.N.
Author_Institution :
Ulyanovsk Branch, Kotel´nikov Inst. of Radio Eng. & Electron., Ulyanovsk, Russia
Abstract :
An upgraded automated installation for higher capacity resolution measuring the capacitance-voltage characteristics of semiconductor devices is described. The system is based on the principle of converting the measured capacitance to the frequency of the LC generator. Measurement capacity is in the range of three frequencies: 100 kHz, 500 kHz, 1 MHz.
Keywords :
capacitance measurement; semiconductor device measurement; voltage measurement; LC generator; capacitance-voltage characteristics; extended frequency range; frequency 1 MHz; frequency 100 kHz; frequency 500 kHz; semiconductor devices; Capacitance; Capacitance measurement; Capacitance-voltage characteristics; Electronic mail; Frequency measurement; Semiconductor device measurement; Semiconductor devices;
Conference_Titel :
Actual Problems of Electron Devices Engineering (APEDE), 2014 International Conference on
Conference_Location :
Saratov
Print_ISBN :
978-1-4799-3437-9
DOI :
10.1109/APEDE.2014.6958239
