• DocumentCode
    155038
  • Title

    Improvement of pressure sensing element with polycrystalline silicone strain gages

  • Author

    Nefed´ev, D.I. ; Volkov, Valentyn S. ; Evdokimov, S.P.

  • Author_Institution
    Penza State Univ., Penza, Russia
  • Volume
    2
  • fYear
    2014
  • fDate
    25-26 Sept. 2014
  • Firstpage
    212
  • Lastpage
    215
  • Abstract
    The article describes use of polycrystalline silicone mesa strain gages for pressure sensors. The new sensor element construction with improving characteristics is described.
  • Keywords
    pressure sensors; silicones; strain gauges; polycrystalline silicone mesa strain gages; pressure sensors; Educational institutions; Electronic mail; Sensor phenomena and characterization; Silicon; Strain;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Actual Problems of Electron Devices Engineering (APEDE), 2014 International Conference on
  • Conference_Location
    Saratov
  • Print_ISBN
    978-1-4799-3437-9
  • Type

    conf

  • DOI
    10.1109/APEDE.2014.6958246
  • Filename
    6958246
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=155038