DocumentCode
1551373
Title
A multilevel Newton method for mixed-energy domain simulation of MEMS
Author
Aluru, N.R. ; White, Jacob
Author_Institution
Beckman Inst. for Adv. Sci. & Technol., Illinois Univ., Urbana, IL, USA
Volume
8
Issue
3
fYear
1999
fDate
9/1/1999 12:00:00 AM
Firstpage
299
Lastpage
308
Abstract
An efficient black-box algorithm for self-consistent analysis of three-dimensional (3-D) microelectromechanical systems (MEMS) is described. The algorithm is matrix-free based and employs a multilevel Newton technique to solve the coupled electromechanical equations. The new approach is shown to converge very rapidly and is much faster than relaxation algorithm for tightly coupled cases. While this paper focuses on coupled electromechanical analysis, the proposed algorithm can be extended to include several coupled domains typically encountered in MEMS
Keywords
Newton method; micromechanical devices; relaxation theory; MEMS model; black-box algorithm; mixed-energy domain simulation; multilevel Newton method; relaxation technique; self-consistent electromechanical analysis; three-dimensional microelectromechanical system; Algorithm design and analysis; Analytical models; Electromechanical systems; Electrostatic analysis; Equations; Jacobian matrices; Microelectromechanical systems; Micromechanical devices; Newton method; Robustness;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/84.788634
Filename
788634
Link To Document