Title :
A multilevel Newton method for mixed-energy domain simulation of MEMS
Author :
Aluru, N.R. ; White, Jacob
Author_Institution :
Beckman Inst. for Adv. Sci. & Technol., Illinois Univ., Urbana, IL, USA
fDate :
9/1/1999 12:00:00 AM
Abstract :
An efficient black-box algorithm for self-consistent analysis of three-dimensional (3-D) microelectromechanical systems (MEMS) is described. The algorithm is matrix-free based and employs a multilevel Newton technique to solve the coupled electromechanical equations. The new approach is shown to converge very rapidly and is much faster than relaxation algorithm for tightly coupled cases. While this paper focuses on coupled electromechanical analysis, the proposed algorithm can be extended to include several coupled domains typically encountered in MEMS
Keywords :
Newton method; micromechanical devices; relaxation theory; MEMS model; black-box algorithm; mixed-energy domain simulation; multilevel Newton method; relaxation technique; self-consistent electromechanical analysis; three-dimensional microelectromechanical system; Algorithm design and analysis; Analytical models; Electromechanical systems; Electrostatic analysis; Equations; Jacobian matrices; Microelectromechanical systems; Micromechanical devices; Newton method; Robustness;
Journal_Title :
Microelectromechanical Systems, Journal of
