Title :
Effect of Electron Heating Mode on Charge-Up Damage in Dual-Frequency Capacitive Discharges
Author :
Kwon, Hyoung Cheol ; Lee, Sung Hee ; Rehman, Aman-Ur ; Lee, Jae Koo
Author_Institution :
Dept. of Electr. Eng., Pohang Univ. of Sci. & Technol., Pohang, South Korea
Abstract :
In dual-frequency capacitive discharges, the effect of electron heating mode on charge-up damage is investigated through a 3-D charge-up simulator coupled with a 1-D particle-in-cell Monte Carlo collision simulation. The local charge-up damage on the trench decreases as the electron heating mode is changed from collisionless to collisional heating.
Keywords :
Monte Carlo methods; high-frequency discharges; plasma radiofrequency heating; plasma simulation; 1D particle-in-cell Monte Carlo collision simulation; 3D charge-up simulator; collisional heating; collisionless heating; dual-frequency capacitive discharges; electron heating mode; local charge-up damage; Current density; Discharges; Electric potential; Electrodes; Heating; Ions; Plasmas; Plasma control; plasma heating; plasma properties;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2011.2157529
