Title :
Constructing single- and multiple-helical microcoils and characterizing their performance as components of microinductors and microelectromagnets
Author :
Rogers, John A. ; Jackman, Rebecca J. ; Whitesides, George M.
Author_Institution :
Lucent Technol., AT&T Bell Labs., Murray Hill, NJ, USA
fDate :
9/1/1997 12:00:00 AM
Abstract :
This paper describes a means for producing single- and multiple-helical microcoils by using microcontact printing to print lines on cylinders. This method was used to fabricate coils made of wires with widths and spaces between 150-25 μm wrapped around cylinders with diameters between 100-400 μm. Results show that microelectromagnets using these microcoils produce magnetic flux densities in excess of 0.4 T and can be switched on and off on a submillisecond time scale
Keywords :
coils; electromagnets; inductors; micromechanical devices; 0.4 T; cylinder; fabrication; microcontact printing; microelectromagnet; microinductor; multiple-helical microcoil; single-helical microcoil; Coils; Fabrication; Magnetic field measurement; Magnetic flux density; Magnetic materials; Magnetic sensors; Magnetic switching; Nuclear magnetic resonance; Soft lithography; Wires;
Journal_Title :
Microelectromechanical Systems, Journal of