Title :
Modeling and optimal design of piezoelectric cantilever microactuators
Author :
DeVoe, Don L. ; Pisano, Albert P.
Author_Institution :
Dept. of Mech. Eng., Maryland Univ., College Park, MD, USA
fDate :
9/1/1997 12:00:00 AM
Abstract :
A novel model is described for predicting the static behavior of a piezoelectric cantilever actuator with an arbitrary configuration of elastic and piezoelectric layers. The model is compared to deflection measurements obtained from 500-μm-long ZnO cantilever actuators fabricated by surface micromachining. Modeled and experimental results demonstrate the utility of the model for optimizing device design. A discussion of design considerations and optimization of device performance is presented
Keywords :
microactuators; piezoelectric actuators; ZnO; model; multimorph; optimal device design; piezoelectric cantilever microactuator; static deflection; surface micromachining; Bonding; Capacitive sensors; Design optimization; Mechanical engineering; Microactuators; Piezoelectric actuators; Piezoelectric films; Predictive models; Structural beams; Zinc oxide;
Journal_Title :
Microelectromechanical Systems, Journal of
