Title :
Correction To "M-test: A Test Chip For Mems Material Property Measurement Using Electrostatically Actuated Test Structures"
Author :
Osterberg, Peter M. ; Senturia, Stephen D.
Author_Institution :
University of Portland, Portland, OR 97203 USA
Keywords :
Biographies; Electrostatic measurements; Laboratories; Material properties; Materials testing; Micromechanical devices; Physics; Semiconductor device measurement;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.1997.623119
